NanoStructures Cleanroom Facility

The NanoStructures Cleanroom Facility (NCF) is a 8,500 square foot shared multi-user environment of Class 100/Class 1000 level space. Tool sets and processes complement research in the chemical and biological nanostructures labs enabling unique capabilities in the pursuit of controlling and manipulating materials at the nanoscale.

Resources

Photolithography

  • Mask Writers
  • Heidelberg DWL 66
  • Heidelberg DWL 200
  • Contact Aligner
  • SUSS Micrtec, MA BA 6

Wet Bench Processing

  • Wet processing of acidic and basic materials
  • Developer Bench
  • Solvent Bench

Contact

Building Manager

Bob Hanson
Phone: (805) 893-4631
Email: bhanson@cnsi.ucsb.edu
Office: 3233 Elings Hall