Impact of carbon and nitrogen impurities in high-k dielectrics on metal-oxide-semiconductor devices

TitleImpact of carbon and nitrogen impurities in high-k dielectrics on metal-oxide-semiconductor devices
Publication TypeJournal Article
Year of Publication2013
AuthorsChoi M, Lyons JL, Janotti A, Van de Walle CG
JournalAppl. Phys. Lett
Volume102
Pagination142902
DOI10.1063/1.4801497