The role of oxygen-related defects and hydrogen impurities in HfO2 and ZrO2

TitleThe role of oxygen-related defects and hydrogen impurities in HfO2 and ZrO2
Publication TypeJournal Article
Year of Publication2011
AuthorsJanotti A., Van de Walle C.G.
JournalMicroelectronic Engineering
Volume88(7)
Pagination1452-1456