Title | Stability of Si impurity in high-? oxides |
Publication Type | Journal Article |
Year of Publication | 2009 |
Authors | Umezawa N., Shiraishi K., Chikyow T. |
Journal | Microelectronic Engineering |
Volume | 86 |
Pagination | 1780 |
Title | Stability of Si impurity in high-? oxides |
Publication Type | Journal Article |
Year of Publication | 2009 |
Authors | Umezawa N., Shiraishi K., Chikyow T. |
Journal | Microelectronic Engineering |
Volume | 86 |
Pagination | 1780 |