Bruker DektakXT Stylus Profilometer

  • Better than 5 Å step height repeatability
  • Up to 1mm measurement range
  • 50 µm to 55 mm scan length
  • Low inertia sensor with 1 to 15 mg of force
  • 2 and 12.5 µm radius stylus tips
  • Surface topography, waviness, and roughness measurement capability
  • 2D stress measurement capability
  • Substrates up to 6"

 

Facility