Nanostructures Cleanroom Facility

Tool sets and processes complement research in the chemical and biological nanostructures labs enabling unique capabilities in the pursuit of controlling and manipulating materials at the nanoscale.

Core Labs

Materials Synthesis Core

A multipurpose bulk crystal growth facility supporting both oxide and intermetallic crystal growth in a variety of growth environments.

CNSI Confocal Microscopy and Spectroscopy Facility

Focused on Confocal Raman and PL Imaging, the facility houses a custom Horiba Jobin Yvon T64000 confocal microscope, equipped with a triple monochromator for high resolution, low cm-1 work, LN2-cooled CCD and PMT/APD detectors, and a stepper-driven µm/mm stage.

The system accommodates multiple excitation wavelengths, including 405 nm (InGaN laser diode), 457-527 nm (Ar+), 532 nm (YAG), and 647 nm (Kr+). Time correlated photon counting with fs-laser excitation (150 fs @ ~800 nm or 400 nm) are coming soon.

Analysis Core

Measurement and analysis equipment for materials and devices. Equipment includes thin-film analysis and profilometry

Vacuum Deposition

A suite of tools for depositing metals and dielectrics. Systems include CVD for diamond, ECR deposition of dielectrics and ITO, and e-beam deposition of metals on organic films.

Photolithography Core

A Class 100 yellow room for contact lithography and direct writing of photomasks and microfluidic molds.

Additional NCF Equipment

The NCF offers a number of additional capabilities in materials synthesis and device fabrication.

Acknowledging Support

Please remember to acknowledge CNSI resources in scientific publications and presentations by including this statement:

“The authors acknowledge the use of the Nanostructures Cleanroom Facility within the California NanoSystems Institute, supported by the University of California, Santa Barbara and the University of California, Office of the President.”

For work related to the Quantum Foundry also include:

"This work is supported by the National Science Foundation through Enabling Quantum Leap: Convergent Accelerated Discovery Foundries for Quantum Materials Science, Engineering and Information (Q-AMASE-i) award number DMR-1906325."

California NanoSystems Institute | UC Santa Barbara