Vacuum Deposition

A suite of tools for depositing metals and dielectrics. Systems include CVD for diamond, ECR deposition of dielectrics and ITO, and e-beam deposition of metals on organic films.

Equipment

A solid-source electron cyclotron resonance (ECR) plasma deposition system that forms high-quality thin films. Films of various oxides and nitrides can be formed, as well as multi-layer films.  

This tool was generously donated to UCSB by the JSW AFTY Corporation of Japan.

OPV fabrication and testing system.

Ultrapure Diamond CVD.