Vacuum Deposition

A suite of tools for depositing metals and dielectrics. Systems include CVD for diamond, ECR deposition of dielectrics and ITO, and e-beam deposition of metals on organic films.

Equipment

JSW AFTY AFTEX-6200 ECR Plasma Deposition System

A solid-source electron cyclotron resonance (ECR) plasma deposition system that forms high-quality thin films. Films of various oxides and nitrides can be formed, as well as multi-layer films.  

This tool was generously donated to UCSB by the JSW AFTY Corporation of Japan.

Organic PhotoVoltaic Device Manufacturing System

OPV fabrication and testing system.

SEKI Diamond CVD

Ultrapure Diamond CVD.

Contact

Rachel Schoeppner

CNSI NCF Lab Manager
Phone: 
(805) 893-2296
Email: 
rachel@cnsi.ucsb.edu

Acknowledging Support

Please remember to acknowledge CNSI resources in scientific publications and presentations by including this statement:

“The authors acknowledge the use of the Nanostructures Cleanroom Facility within the California NanoSystems Institute, supported by the University of California, Santa Barbara and the University of California, Office of the President.”

For work related to the Quantum Foundry also include:

"This work is supported by the National Science Foundation through Enabling Quantum Leap: Convergent Accelerated Discovery Foundries for Quantum Materials Science, Engineering and Information (Q-AMASE-i) award number DMR-1906325."

Location

Documents

PDF icon Access Instructions for Non-UCSB Users
PDF icon NCF User Policy
PDF icon On-Campus New User NCF Access